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日本Crestec Corporation
日本CRESTEC公司為21世紀先進(jìn)納米科技提供尖端的電子束納米光刻(EBL)系統,或稱(chēng)電子束直寫(xiě)(EBD)、電子束爆光系統。型號包括CABL-9000C系列、CABL-9000TF系列、8000TF系列、CABL-4200LB及CABL-4200LB。其中CABL-9000C系列最小線(xiàn)寬可達8nm,最小束斑直徑2nm,套刻精度 20nm(mean+2σ),拼接精度 20nm(mean+2σ)。
At the Crestec, we are commited to be an excellent company which is trusted throughout the world by implementation of customer first, respect for the individual, challenge to innovation and solidity of our team. We also cotribute to offer the Crestec's low-cost and high-quality products.