英國Nanobean 電子束光刻機
價(jià) 格：詢(xún)價(jià)
產(chǎn) 地：更新時(shí)間：2021-01-19 15:36
品 牌：型 號：Photonic Professional GT2
狀 態(tài)：正常點(diǎn)擊量：2078
400-006-7520
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上海非利加實(shí)業(yè)有限公司
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400-006-7520
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400-006-7520
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英***Nanobean NB5 電子束光刻機
具有良好的穩定性，平均正常運行時(shí)間超過(guò)93%
規格:
束流電壓范圍為: 20kV - 100kV
光刻膠的特征尺寸: <8nm (光刻精度)
500um區域拼接/疊加誤差: 小于25nm
自動(dòng)裝載5卡盤(pán)氣鎖系統
NB5發(fā)展目標:
改進(jìn)設計和組件以減少日常服務(wù)需求。
實(shí)現每年少于5%的機器故障停機時(shí)間。
提高性能
便于批量生產(chǎn)。
NB5系統將為進(jìn)***步發(fā)展高偏轉速度和進(jìn)***步集成電子提供平臺。
The nB4 is a generation ahead of the current competition ａnd with its field-proven performance has gained acceptance in the market place. It has excellent stability ａnd has demonstrated an average uptime of greater than 93%. NanoBeam now introduces the nB5 which has been developed to further reduce delivery times ａnd service costs.
NB5 development aims:
Refine design ａnd components to reduce routine service requirements.
Achieve a machine-fault-downtime of less than 5% annually.
Enhance performance
Facilitate volume production.
Specification:
Beam Voltage range 20kV - 100kV
Feature size on resist <8nm
Stitching/overlay error <25nm for 500um field
Automatic loading 5 chuck airlock system
The nB5 system will provide a platform for further development to high deflection speed ａnd further integrated electronics.
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