| 800型光學(xué)正面和背面光刻機系統 OAI模型800光刻機是半自動(dòng),four-camera、光學(xué)正面和背面光刻機。它提供極其精確的(1碌m - 2 m碌)對準精度,旨在大大超過(guò)任何紅外背后對準器性能的***個(gè)非常有競爭力的價(jià)格。通用模型800光刻機是理想的用于低產(chǎn)量、研發(fā)實(shí)驗室和大學(xué)。
模型800光刻機配置了各種各樣的的OAI紫外線(xiàn)光源,在權力范圍2千瓦。光刻機工具可以容納基質(zhì)8英寸廣場(chǎng),以及晶片卡盤(pán)定位允許方便裝卸。這個(gè)劃算的光刻機還包括機動(dòng)背后焦點(diǎn),電動(dòng)汽車(chē)水準和汽車(chē)差距設置。
建立在隔振平臺,固定器總成擔保的固定不變的面具對準精度和可重復性。使用易讀的操作簡(jiǎn)化,PLC觸摸屏。培訓時(shí)間短,操作員可以有效地學(xué)習使用光刻機在不到***個(gè)小時(shí)。
Model 800 Optical Front ａnd Backside Mask Aligner System
The OAI Model 800 Mask Aligner is a semi-automated, four-camera, optical front ａnd backside mask Aligner. It delivers ultra-precise (1碌m-2碌m) alignment accuracy ａnd is designed to greatly surpass the performance of any IR backside Aligner at an extremely competitive price. The versatile Model 800 mask Aligner is ideal for use in low volume production, R&D labs, ａnd universities.
The Model 800 Mask Aligner is configured with a wide variety of OAI UV light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square, ａnd the wafer chuck is positioned to allow for easy loading ａnd unloading. This cost-effective mask Aligner also features motorized backside focus, motorized auto leveling ａnd auto gap setting.
Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy ａnd repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour. |
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